Preface
Pt. I Overview and Materials 1
Ch. 1 An Introduction to Microelectronic Fabrication 3
Ch. 2 Semiconductor Substrates 10
Pt. II Unit Process I: Hot Processing and Ion Implantation 37
Ch. 3 Diffusion 39
Ch. 4 Thermal Oxidation 68
Ch. 5 Ion Implantation 98
Ch. 6 Rapid Thermal Processing 127
Pt. III Unit Processes 2: Pattern Transfer 149
Ch. 7 Optical Lithography 151
Ch. 8 Photoresists 183
Ch. 9 Nonoptical Lithographic Techniques[superscript +] 205
Ch. 10 Vacuum Science and Plasmas 236
Ch. 11 Etching 258
Pt. IV Unit Processes 3: Thin Films 293
Ch. 12 Physical Deposition: Evaporation and Sputtering 295
Ch. 13 Chemical Vapor Deposition 326
Ch. 14 Epitaxial Growth 355
Pt. V Process Integration 399
Ch. 15 Device Isolation, Contacts, and Metallization 401
Ch. 16 CMOS Technologies 439
Ch. 17 GaAs Technologies 471
Ch. 18 Silicon Bipolar Technologies 488
Ch. 19 MEMS 514
Ch. 20 Integrated Circuit Manufacturing 559
App. I: Acronyms and Common Symbols 580
App. II Properties of Selected Semiconductor Materials 585
App. III Physical Constants 586
App. IV Conversion Factors 588
App. V Some Properties of the Error Function 591
App. VI F Values 595
App. VII SUPREM Commands 597
Index 599